000 00414nam a2200181Ia 4500
008 140910s9999 xx 000 0 und d
082 _a620
082 _bCAM - S
100 _aCampbell, Steven A
245 2 _aA Science & Engineering Of Microelectron
260 _aNew York
260 _bOxford Uni. Press
260 _c2001
300 _a603p
650 _aELECTRONICS
942 _2DDC
942 _cBook
999 _c23336
_d23336