| 000 | 00405nam a2200181Ia 4500 | ||
|---|---|---|---|
| 008 | 140910s9999 xx 000 0 und d | ||
| 082 | _a621.4 | ||
| 082 | _bMAY - F | ||
| 100 | _aMay, Gray S. | ||
| 245 | _aFundalmental Of Semiconductor Fabrication | ||
| 260 | _aNew York | ||
| 260 | _bJonh Willey | ||
| 260 | _c2004 | ||
| 300 | _a305p | ||
| 650 | _aELECTRONICS | ||
| 942 | _2DDC | ||
| 942 | _cBook | ||
| 999 |
_c21011 _d21011 |
||