Introduction to Microelectronical (MEM) Microwave Systems

Microelectromechanical Systems - MEMS Origins. MEMS Impetus/Motivation. MEMS Fabrication Technologies. Exercises. Summary. References. ; Fundamental MEMS Device Physics-Actuation. Mechanical Vibrations. Computer-Aided Design of MEMS. Exercises. Summary. References.; Fundamental MEMS Devices: The MEMS Switch -Introduction. The Cantilever Beam MEM Switch. MEM Switch Design Consideration. Summary. References.; Fundamental MEMS Devices: The MEM ResonatorëëIntroduction. The Cantilever Beam MEM Resonator. MEM Resonator Design Considerations. Exercises. Summary. References.; Microwave MEMS Applications -Introduction. MEM Switches. Micromachining-Enhanced Planar Microwave Passive Elements. Summary. References.; MEMS-Based Microwave Circuits and Systems -Introduction. Wireless Communications Systems. MEMS-Based RF and Microwave Circuits. Summary. References.;